Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability
نویسندگان
چکیده
nanocantilevers using electrostatic pull-in instability H. Sadeghian, C. K. Yang, J. F. L. Goosen, E. van der Drift, A. Bossche, P. J. French, and F. van Keulen Structural Optimization and Computational Mechanics (SOCM) Group, Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft, Zuid Holland 2628 CD, The Netherlands Electronic Instrumentation Laboratory, Delft University of Technology, Mekelweg 4, Delft, Zuid Holland 2628 CD, The Netherlands Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, Zuid Holland 2628 CJ, The Netherlands
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